第14章微流控芯片.ppt

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1、第1-4章 微流控芯片目 录一发展背景二制备技术三流体控制四典型实例五商品简介目 录一发展背景二制备技术三流体控制四典型实例五商品简介Do you know?Biochip生物芯片 Lab-on-a-Chip 芯片实验室Labchip Microfluidic Chip 微流控芯片 Micro Total Analysis System(MicroTAS,TAS)微全分析系统 Research into miniaturization is primarily driven by the need to reduce costs by reducing the consumption of e

2、xpensive reagents and by increasing throughput and automation.For example,most are aware of the increasing cost of health care,driven in part by the cost of implementing the latest diagnostic assays.These assays,which are usually performed in microtiter plates that consume hundreds of microliters of

3、 reagents,would benefit from the use of microfabricated arrays of nanoliter volume vials.By reducing reagent consumption by a factor of 103104,these devices could provide dramatic savings for the repetitive assays often performed in diagnostic laboratories.Why miniaturization？Anal.Chem.2000,72,330A-

4、335AIn the same way that integrated circuits allowed for the miniaturization of computers from the size of a room to the size of a notebook,miniaturization has the potential to shrink a room full of instruments into a compact lab-on-a-chip.Anal.Chem.2000,72,330A-335A尺寸效应（cm100m）尺寸1/100 分子扩散时间1/10,00

5、0(1h0.36s)体积1/1,000,000试剂用量1t1g,mlnl 传热速度1500oC/s由此将带来：方法上的变革 理论上的突破 还有巨大的经济和社会效益微流控分析芯片 微流控分析芯片目的是通过化学分析设备的微型化与集成化，最大限度地把分析实验室的功能转移到便携的芯片中。微流控分析芯片通过微机电加工技术把整个实验室的功能，包括采样、稀释、加试剂、反应、分离、检测等集成在几平方厘米的微流控芯片上，且可多次使用，因而极大地减少了样品和分析试剂的用量，降低了分析的成本，加快了分析的速度，具有广泛的适用性。The Early Days:1975-1989 The first analytica

6、l miniaturized deviceA gas chromatographic air analyzer fabricated on a silicon wafer Terry,S.C.Ph.D.Thesis,Stanford,Stanford,CA,1975Terry,Stephen C.;et al.IEEE Transactions on Electron Devices,1979,ED-26(12),1880 A miniature gas anal.system based on the principles of gas chromatog.The major compone

7、nts are fabricated in Si using photolithog.and chem.etching techniques,which allows size redns.of nearly 3 orders of magnitude compared to conventional laboratory instruments.consists of a sample injection valve,a 1.5-m-long capillary column.A thermal conductivity detector fabricated on a separate s

8、ilicon wafer.sepns.of gaseous hydrocarbon mixts.are performed in 10 s.发 展 历 史 Photograph of a gas chromatograph integrated on a planar silicon wafer fabricated by Terry and co-workers at Stanford University.However,the response of the scientific community to this first silicon chip device was virtua

9、lly none,presumably because of the lack of technological experience(of the separation scientists)to deal with this kind of device.the research work related to miniaturization on silicon focused on the fabrication of components such as micropumps,microvalves,and chemical sensors.The Renaissance:1990-

10、1993 the reemergence of silicon-based analyzersDesign of an open-tubular column liquid chromatograph using silicon chip technologyManz,A.;et al.Sensors and Actuators,B:Chemical(1990),B1(1-6),249 A novel concept of high pressure liquid chromatog.a silicon chip with an open-tubular column and a conduc

11、tometric detector.A 55mm chip containing an open-tubular column of 6 m2m15cm was fabricated,which has theor.separation efficiencies of 8000 and 25,000 plates in 1 and 5 min,resp.The total column volume is 1.5 nL and the detection cell volume 1.2 pL.Micrograph of Liquid Chromatograph chip manufacture

12、d by Manz and co-workers at Hitachi Ltd.The concept of miniaturized total chemical analysis system or TAS was proposed by Manz et al.the main reason for miniaturization was therefore to enhance the analytical performance of the device rather than to reduce its size.it was also recognized that a smal

13、l size presented the advantage of a smaller consumption of carrier,reagent,and mobile phase.Growing to Critical Mass:1994-1997 In 1994,the number of published papers related to TAS increased abruptly since more research groups joined the efforts to develop the area.Microfabrication Design Separation

14、s Biochemical Reactors Detection 分类与特点 分类：材料：硅、玻璃、石英、聚合物、复合材料功能：分离、采样与前处理、检测、化学合成等 特点：高效、低耗、集成、一致性好、昂贵目 录一发展背景二制备技术三流体控制四典型实例五商品简介微结构的形成1经典的光刻技术Photolithograph procedures for making glass template.(a)Spine coating of photoresist,(b)covered with photo mask,(c)exposure,(d)developing,(e)etching,and(f)r

15、emoval of photoresist.适合硅、玻璃、石英等材料，与传统的半导体工业的方法一致。分为湿法和干法两种，干法的分辨率较湿法高，相应的制造成本也高。Analyst,2004,129,305308制备技术 之微结构的形成2模版浇注法（模塑法）Process overview for mass manufacturing of plastic microfluidic systems 适合聚合物材料。大批量生产时成本低。Anal.Chem.,2002,74,78A-86A微结构的形成3模版热压法Schematic representation of the fabrication m

16、ethod involving hotembossing of thermoplastic polymer pellets and thermal bonding.适合热塑性聚合物。Applied Physics Letters,2002,80,3614-3616微结构的形成4激光刻蚀法用激光直接在聚合物或玻璃上加热形成微结构.Anal.Chem.,1997,69,2035-2042 MicrofilterSensors and Actuators B 67 2000 203208芯片的封装1热键合对玻璃和石英材质刻蚀的微结构一般使用热键合对玻璃和石英材质刻蚀的微结构一般使用热键合方法，将加工好的基片和相同材质的盖片洗净烘干对方法，将加工好的基片和相同材质的盖片洗净烘干对齐紧贴后平放在高温炉中，在基片和盖片上下方各放齐紧贴后平放在高温炉中，在基片和盖片上下方各放一块抛光过的石墨板，在上面的石墨板上再压一块重一块抛光过的石墨板，在上面的石墨板上再压一块重0.5kg的不锈钢块，在高温炉中加热键合。玻璃芯片键的不锈钢块，在高温炉中加热键合。玻璃芯片键合时，高温炉升温速度为合时，高温炉升温速度